Philip Chang is an industry-wide recognized expert in electron beam technology.  He received his Ph.D. from Cambridge University, England in 1967. From 1971 to 1997, he worked at the IBM T. J. Watson Research Center at Yorktown Heights, New York, on electron beam lithography and microfabrication technologies.  At IBM, he pioneered the microcolumn approach.  He joined Etec Systems (acquired by Applied Materials in 1999) in 1997 as director of the Multibeam technology group and was the program manager for the DARPA-funded Microcolumn and Multisource develop-ment programs.  He published widely and holds a number of patents in the fields of electron beam technology, lithography and microfabrication.

Eric Munro received his BA Degree in Engineering from Cambridge University in 1968 and his PhD from Cambridge in 1972.  His PhD thesis “Computer Aided Design Methods in Electron Optics”pioneered the use of the finite element method in electron optics for simulation and design of electron lenses.  He has worked in electron optical research continuously since that time.  He was a Research Fellow at Trinity College, Cambridge, at IBM Research Center, Yorktown Heights, NY, a Research Fellow at Imperial College, London, and a Visiting Researcher at Oregon Graduate Center.  In 1991 he founded his own company, Munro’s Electron Beam Software Ltd., developing commercial software for simulation and design of charged particle optical systems.  He has worked on theory and software for high order aberrations, discrete Coulomb interaction effects, and differential algebraic methods, and has published over 50 papers.

Vladimir Kolarik was born on 3 October 1945 at Jemnice.  He finished his studies at the Faculty of Science, Masaryk University in Brno in 1971 (MSc.). He defended his PhD. thesis entitled "Field emission electron sources" in 1983. He has been working in the Institute of Scientific Instruments of the Czechoslovak Academy of Sciences from 1968 to 1990. In 1990 he founded Delong instruments, a private company specializing in vacuum devices and electron microscopes.  His research interests are concentrated on new approaches in electron and ion microscopy. He is author and coauthor of more than 50 papers in international journals and conference proceedings and holds 32 patents.

Eric Munro

Vladimir Kolarik

Philip Chang

Technical Advisory Board