OPTICS: Simulation of Electron and Ion Beam Columns

This software package is for computing the optical properties of complete electron and ion beam columns, containing any combination of electrostatic and magnetic lenses and deflectors.  The program computes all the optical properties and rotationally symmetric and multipole geometrical aberrations of third order, and all the chromatic aberrations of first order using paraxial rays and aberration integrals.  The software can handle both Gaussian round beam systems and shaped beam systems, and the fields of the various elements can be superimposed on each other.

The electrostatic and magnetic lens fields are computed by the first-order finite element method (FEM).  For magnetic lenses, the field can be computed in the

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lepiece region with a scalar potential, or throughout the complete lens, including the magnetic circuit and coil windings, with a vector potential.  Magnetic saturation is handled with numerically specified B-H curves.

For electrostatic deflectors, the fields are computed either with the charge density method (CDM), or with the first-order FEM, using cylindrical harmonic components.  For magnetic deflectors, the fields are computed with the Biot-Savart law if the coils are in free space, or with the FEM if magnetic materials are present in the vicinity of the coils. 

The deflection system

can have up to three independent channels (main, sub and tertiary field).  Each channel can be either electrostatic or magnetic.  The electrostatic deflectors can have multipole or planar electrodes.  The magnetic deflectors can be toroidal or saddle coils, either in free space, inside magnetic circuits or wound on magnetic formers.  The x and y deflection coils (or deflection plates) can be located either at the same axial location or at sequential positions along the z-axis. 

The software is a comprehensive package and has recently been enhanced to incorporate a graphical user interface (GUI) that operates under the latest Microsoft Windows Operating systems. 

If you are interested in the OPTICS package, please contact us at info@electronoptica.com.

Spot diagram across scan field.

Equipotentials of 1st harmonic field.

Potential distribution in an electrostatic lens.

Flux distribution in a magnetic lens.