The following MEBS software packages are available:

OPTICS computes optical properties of electron and ion beam columns

REFINE optimizes interactively electron and ion beam columns

DYNAMIC computes effects of dynamic correction elements in electron and ion beam columns

TOLERANCE computes aberrations due to machining errors in lenses and deflectors

SOURCE simulates and aids the design of electron and ion sources

MECH aids the design and mechanical tolerancing of electron lenses

CO-3D computes optical properties and ray traces in combined electrostatic and magnetic 3D fields

SOFEM calculates fields and raytraces in lenses and deflectors using the second-order finite element method

ABER-5 computes fifth-order aberrations of electron lenses

MULTIPOLE aids the simulation and design of multipole lens systems

WIEN simulates Wien filters

IMAGE computes the combined effects of aberrations and Coulomb interactions

PROJECTION aids the design and optimization of projection systems

WAVE computes the combined effects of electron diffraction and lens aberrations

If you are interested in any of these packages, please contact us at info@electronoptica.com.