Prior to founding Electron Optica, Marian was project leader and manager of an electron optics group at KLA-Tencor. He designed and tested prototypes of next-generation electron beam inspection tools based on dual-beam low energy electron microscopy (LEEM), supported by DARPA under the PERIS program. He was key inventor and coauthor of the reflection electron lithography (REBL) approach, a LEEM-based technique funded by DARPA in 2007.
Prior to joining KLA-Tencor, he was manager of the multibeam program and group at Etec Systems (Applied Materials), which developed a combined laser and electron pattern generator using multiple photoemitted electron beams, also funded by DARPA. He also designed and tested the next generation microcolumn electron optics as well as the prototype column used in Etec Systems MEBES 5500 pattern generator.
As a postdoctoral research fellow in R.M. Tromp’s group at the IBM T.J. Watson Research Center in Yorktown Heights, NY, he designed and tested a magnetic prism array for the next generation IBM-LEEM II, conducted surface experiments on Si(100), developed hot electron emission microscopy and lithography, and studied MOS structures.
During his graduate studies at Arizona State University in Tempe, AZ he implemented the far-out-of-focus mode of electron holography in a dedicated FEG STEM and used it to study magnetic thin films and particles under the advisorship of Profs. J.M. Cowley and M.R. Scheinfein.
While at the Institute of Scientific Instruments of the Czech Academy of Sciences in Brno, Czech Republic, he built a scanning ion microscope and developed modeling techniques for magnetic prism arrays for LEEM, working with Dr. V. Kolarik. He also made research visits at the Technical University Delft, Holland (Prof. P. Kruit) and Clausthal, Germany (Prof. E. Bauer).
He received his Ph.D. in Physics from Arizona State University in Tempe, Arizona (1994), and M.Sc. in Physical Electronics and Optics from the University of J.E. Purkyne, Brno, Czechoslovakia (1987).
Marian is the recipient of the Ernst Ruska Award of the European Microscopy Society (2000), M. Anderson Award for best Ph.D. Dissertation in the Department of Physics at Arizona State University (1995), and the Presidential Award of the University of J.E. Purkyne, Brno, Czechoslovakia (1987).
